THz Sensors Group



The THz Sensors Laboratory has ~1100 square feet dedicated to fabrication, package, and intergration of THz devices, components and systems.

A list of facilities and equipment is as follows:

  1. Class 100 clean room (~260SF) for basic photolithography down to ~1 um.
  2. Class 1000 clean room (~835SF)
  3. Basic metallization including thermal evaporation
  4. 4Wet-chemical processing including lift-off, etch back
  5. Fast Annealing
  6. Lapping and polishing down to 100 um
  7. Diagnosing, analyzing and imaging capability
  8. Reactive-ion etching including plasma ashing